SEMICOSIL® 4MS-EL

Tetramethylsilane (TMS) is a low-boiling colorless liquid.

  • CAS No. 75-76-3
  • Empirical formula C4H12Si
  • Molecular weight 88,2

Properties

- high purity
- low metal content
- low chloride content

SEMICOSIL® 4MS-EL was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.

 

Storage

The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.

Sales and support

Wacker Chemical Corporation
S State Road 4950
Ann Arbor, MI 48108
United States
+1  888  922-5374 (Phone)
Contact

How can we help you?

  • Do you need help in choosing a product or do you require technical support? If so, please contact our experts.
Ask a question

Order

My media


Go to order form

Sales Contact

Wacker Chemical Corporation
S State Road 4950
Ann Arbor, MI 48108
+1  888  922-5374 (Phone)

My favorites

My products