SEMICOSIL® 4MS-EL

Tetramethylsilane (TMS) is a low-boiling colorless liquid.

  • CAS No. 75-76-3
  • Empirical formula C4H12Si
  • Molecular weight 88,2

Properties

- high purity
- low metal content
- low chloride content

SEMICOSIL® 4MS-EL was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.

 

Storage

The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.

Sales and support

Wacker Chemicals (South Asia)Pte.Ltd.
111A Pasteur, Ben Nghe Ward
700000 Ho Chi Minh City
Vietnam
+84  28  352025772588 (Phone)
+84 8 3825-6721  (Fax)
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Wacker-Chemie, s.r.o.
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+420  378  010-103 (Phone)

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