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SEMICOSIL® 4MS-EL

Tetramethylsilane (TMS) is a low-boiling colorless liquid.

  • CAS No. 75-76-3
  • Empirical formula C4H12Si
  • Molecular weight 88,2

Properties

- high purity
- low metal content
- low chloride content

SEMICOSIL® 4MS-EL was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.

 

Storage

The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.

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Wacker Chemicals Ltd.
2 Arlington Square, Downshire Way
Bracknell RG12 1WA
United Kingdom
+44  1344  401 670 (Phone)
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Wacker Chemie AG
Heilbronner Strasse 74
70191 Stuttgart
+49  711  61942-0 (Phone)

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