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SEMICOSIL® 4MS-EL
Tetramethylsilane (TMS) is a low-boiling colorless liquid.
- CAS No. 75-76-3
- Empirical formula C4H12Si
- Molecular weight 88,2
Properties
- high purity
- low metal content
- low chloride content
- low metal content
- low chloride content
Data sheets
SEMICOSIL® 4MS-EL was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.
Storage
The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.
Sales and support
Wacker Chimie S.A.S.
+33 478 176-019 (Fax)
Contact
11, bis quai Perrache
69002 Lyon, France
France
+33
478
176-010
(Phone)69002 Lyon, France
France
+33 478 176-019 (Fax)
How can we help you?
- Do you need help in choosing a product or do you require technical support? If so, please contact our experts.
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